ASM

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20927-11

Control BoardASM

PCB Board

ASM 20927-11 PCB circuit board.

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20932-03-N

Control BoardASM

PCB Board

ASM 20932-03-N PCB circuit board.

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414-3-54-107950A15

Process ControllerASM

Liquid Vapor Controller

ASM/Qualiflow LVC414 liquid vapor controller assembly (config 414-3-54-107950A15) that meters and controls the mass flow of liquid dopant sources for semiconductor CVD/diffusion processes.

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4552144

Control BoardASM

Output Card

ASM 4552144 output card.

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IS200BPVCG1BR1

BackplaneGE

Backplane Board

GE Mark VI IS200BPVCG1BR1 backplane board.

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LVC414

Process ControllerASM

Liquid Vapor Controller

ASM/Qualiflow LVC414 electronic liquid vapor controller that meters and controls mass flow rate of liquid dopant sources (e.g. SiCl4, POCl3, GeCl4, BBr3) by varying carrier-gas flow for semiconductor CVD/diffusion processes.

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Parts catalogue

ASM

PCB Board

PCB Board

Liquid Vapor Controller

Output Card

Backplane Board

Liquid Vapor Controller