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Search electrostatic chuck references by OEM, aftermarket, Kaysan, or manufacturer number. Each result links to a crawlable part page and wholesale enquiry.
Applied Materials (AMAT) MCA ESC heater assembly for 300mm wafers, used in PVD/Endura semiconductor process chambers to heat the electrostatic chuck.
Lam Research electrostatic chuck, part number 839-800327-315.